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    • 专利摘要:
    The invention relates to an optoelectronic device (5) comprising a semiconductor substrate (10) comprising a face (12), light-emitting diodes (LEDs) resting on the face and comprising wired, conical or frustoconical semiconductor elements (20) and a layer at least partially transparent dielectric (34) covering the light-emitting diodes, the refractive index of the dielectric layer being between 1.6 and 1.8.
    公开号:FR3015772A1
    申请号:FR1363005
    申请日:2013-12-19
    公开日:2015-06-26
    发明作者:Tiphaine Dupont；Yohan Desieres
    申请人:Commissariat a lEnergie Atomique CEA；Aledia；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    [0001] TECHNICAL FIELD The present invention relates generally to optoelectronic devices based on semiconductor materials and to their manufacturing processes. BACKGROUND OF THE INVENTION The present invention relates generally to optoelectronic devices based on semiconductor materials and to their manufacturing processes. The present invention more particularly relates to optoelectronic devices comprising light-emitting diodes formed by three-dimensional elements, in particular semiconductor microwires or nanowires. DESCRIPTION OF THE PRIOR ART Light-emitting diode optoelectronic devices are devices adapted to convert an electrical signal into electromagnetic radiation, and in particular devices for emitting electromagnetic radiation, in particular light. Examples of three-dimensional elements suitable for producing light-emitting diodes are microwires or nanowires comprising a semiconductor material based on a compound comprising predominantly at least one group III element and a group V element (for example gallium nitride). GaN), hereinafter referred to as III-V compound.
    [0002] B12791 - DD14773JBD 2 The extraction efficiency of an optoelectronic device is generally defined by the ratio between the number of photons escaping from the optoelectronic device and the number of photons emitted by the light-emitting diodes. It is desirable that the extraction efficiency of an optoelectronic device be as high as possible. A disadvantage of existing optoelectronic devices is that a fraction of the photons emitted within each light-emitting diode do not escape from the light-emitting diode. Another disadvantage of existing optoelectronic devices is that part of the light emitted by each light-emitting diode is trapped or absorbed by neighboring light-emitting diodes. SUMMARY Thus, an object of an embodiment is to overcome at least in part the disadvantages of optoelectronic devices with light-emitting diodes, especially with microwires or nanowires, previously described and their manufacturing processes. Another object of an embodiment is to increase the extraction efficiency of the optoelectronic device. Another object of one embodiment is to reduce the proportion of light that does not escape from each light emitting diode. Another object of one embodiment is to reduce the proportion of the light emitted by a light emitting diode which is absorbed / trapped by neighboring light emitting diodes. Another object of an embodiment is that optoelectronic LED devices can be manufactured on an industrial scale and at low cost.
    [0003] Thus, an embodiment provides an optoelectronic device comprising: a semiconductor substrate comprising a face; light-emitting diodes resting on the face and comprising wired, conical or frustoconical semiconductor elements; and an at least partially transparent dielectric layer covering the light-emitting diodes, the refractive index of the dielectric layer being between 1.6 and 1.8. According to one embodiment, the refractive index of the dielectric layer is between 1.7 and 1.75. According to one embodiment, each semiconductor element is predominantly a III-V compound.
    [0004] According to one embodiment, each semiconductor element mainly comprises gallium nitride. According to one embodiment, the average diameter of each semiconductor element is between 200 nm and 1 pin. According to one embodiment, the encapsulation layer 20 comprises a matrix of a first at least partially transparent material in which particles of a second material are distributed, the refractive index of the second material being strictly greater than the index. of refraction of the first material. According to one embodiment, the first material is a polysiloxane. According to one embodiment, the second material is a dielectric material chosen from titanium oxide (TiO 2), zirconium oxide (ZrO 2) and zinc sulphide (ZnS). According to one embodiment, the encapsulation layer is made of a material chosen from the group comprising epoxy polymers, silicon oxides of the SiOx type where x is a real number strictly greater than 0 and less than or equal to 2 silicon oxides of the SiOyNz type, where y is a real number strictly greater than 0 and less than or equal to 2 and B is strictly greater than 0 and less than or equal to 0.57, and the oxide of aluminum (A1203). According to one embodiment, the light-emitting diodes are distributed over a portion of the face and the surface density of light-emitting diodes on the portion decreases away from the edges of said portion. According to one embodiment, the electroluminescent diodes are distributed over a portion of the face and the ratio between the perimeter of said portion and the surface of said portion is greater than or equal to 4 for a unit area. According to one embodiment, the portion corresponds to a perforated surface. BRIEF DESCRIPTION OF THE DRAWINGS These and other features and advantages will be set forth in detail in the following description of particular embodiments in a non-limiting manner in connection with the accompanying drawings in which: FIG. sectional, partial and schematic section of an embodiment of an optoelectronic device with microfilts or nanowires; Figures 2 to 6 illustrate different path configurations followed by light rays in microwires or nanowires; FIG. 7 represents the evolution of the distribution of the propagation modes of the light provided by a light emitting diode with microfil or nanowire as a function of the refractive index of the material surrounding the light emitting diode; Fig. 8 shows an evolution curve of the percentage of guided modes trapped in a microfilament or nanowire of a light-emitting diode as a function of the refractive index of the material surrounding the light-emitting diode; FIG. 9 is a top view, partial and schematic, of an optoelectronic device comprising electroluminescent diodes with microwires or nanowires; FIG. 10 shows the variations of the extraction efficiency according to the position considered on the front face of the optoelectronic device of FIG. 9; and Figures 11 to 20 are top, partial and schematic views of embodiments of optoelectronic devices including electroluminescent diodes with microwires or nanowires. DETAILED DESCRIPTION For the sake of clarity, the same elements have been designated with the same references in the various figures and, moreover, as is customary in the representation of the electronic circuits, the various figures are not drawn to scale. In addition, only the elements useful for understanding the present description have been shown and are described. In particular, the polarization means of the light-emitting diodes of an optoelectronic device 20 are well known and are not described. In the rest of the description, unless otherwise indicated, the terms "substantially", "about" and "of the order of" mean "to within 10%". In addition, "compound consisting mainly of a material" or "compound based on a material" is understood to mean that a compound has a proportion greater than or equal to 95% of said material, this proportion preferably being greater than 99%. . The present description relates to optoelectronic devices with three-dimensional elements, for example wire elements, conical or frustoconical, including microfilms or nanowires. The term "microfil" or "nanowire" refers to a three-dimensional structure of elongate shape in a preferred direction of which at least two dimensions, called minor dimensions, are between 5 nm and 2.5 pin, preferably B12791 - DD14773JBD 6 between 50 nm and 2.5 pin, the third dimension, called major dimension, being at least equal to 1 time, preferably at least 5 times and even more preferably at least 10 times, the largest of the minor dimensions. In some embodiments, the minor dimensions may be less than or equal to about 1 μm, preferably between 100 nm and 1 μm, more preferably between 100 nm and 800 nm. In some embodiments, the height of each microfil or nanowire may be greater than or equal to 500 nm, preferably between 1 and 50 gm. In the remainder of the description, the term "wire" is used to mean "microfil or nanowire". Preferably, the average line of the wire which passes through the barycenters of the straight sections, in planes perpendicular to the preferred direction of the wire, is substantially rectilinear and is hereinafter called "axis" of the wire. FIG. 1 is a partial, schematic sectional view of an embodiment of an optoelectronic light-emitting diode device.
    [0005] In Figure 1, there is shown a structure comprising, from the bottom upwards: a first electrode 8; a semiconductor substrate 10 comprising a lower face 11 and an upper face 12, the lower face 11 being covered with the first electrode 8 and the upper face 12 being preferably flat at least at the level of the light-emitting diodes; seed pads 16 made of a conductive material promoting the growth of threads and arranged on the face 12; son 20 (six son being represented) of height H1, each wire 20 being in contact with one of the seed pads 16, each wire 20 comprising a lower portion 22, of height H2, in contact with the seed pad 16 and an upper portion 24, of height H3, extending the lower portion 22; B12791 - DD14773JBD 7 an insulating layer 26 extending on the face 12 of the substrate 10 and on the lateral flanks of the lower portion 22 of each wire 20; a shell 28 comprising a stack of semiconductor layers covering each upper portion 24; a layer 30 forming a second electrode covering each shell 28 and extending, furthermore, on the insulating layer 26; a conductive mirror layer 32 covering the electrode layer 30 between the wires 20 but not extending over the wires 20; and an encapsulation layer 34 covering the entire structure and in particular the electrode 30 and comprising a front face 36. The optoelectronic device 5 may further comprise a layer of phosphors, not shown, provided on the layer encapsulation 34 or confused with it. The assembly formed by each wire 20, the germination pad 16 and the associated shell 28 constitutes a LED 20. The base of the LED corresponds to the germination pad 16. The shell 28 comprises in particular an active layer which is the layer from which is emitted the majority of the electromagnetic radiation provided by the LED. The LEDs 25 may be connected in parallel and form a set of light emitting diodes. The assembly can include from a few LEDs to a thousand light emitting diodes. LEDs may not be formed on the whole of the face 12. The active area is the part of the face 12 on which light-emitting diodes are formed. The substrate 10 may correspond to a one-piece structure or correspond to a layer covering a support 35 made of another material. The substrate 10 is preferably a semiconductor substrate, for example a substrate made of silicon, germanium, silicon carbide, a compound III-V, such as GaN or GaAs, or a substrate made of ZnO. Preferably, the substrate 10 is a monocrystalline silicon substrate. Preferably, it is a semiconductor substrate compatible with the manufacturing processes implemented in microelectronics. The substrate 10 may correspond to a multilayer structure of silicon on insulator type, also called SOI (acronym for Silicon On Insulator).
    [0006] The substrate can be heavily doped, weakly doped or undoped. In the case where the substrate is heavily doped, the semiconductor substrate 10 may be doped so as to lower the electrical resistivity to a resistivity close to that of the metals, preferably less than a few mohm.cm. The substrate 10 is, for example, a strongly doped substrate with a dopant concentration of between 5 * 1016 atoms / cm3 and 2 * 1020 atoms / cm3. In the case where the substrate is weakly doped, for example with a dopant concentration less than or equal to 5 * 1016 atoms / cm 3, preferably substantially equal to 10 15 atoms / cm 3, a doped region of the first type of conductivity or a second type of conductivity, opposed to the first type, more strongly doped than the substrate may be provided which extends in the substrate 10 from the face 12 under the seed pads 16. In the case of a silicon substrate 10, Examples of P type dopants are boron (B) or indium (In) and examples of N type dopants are phosphorus (P), arsenic (As), or antimony (Sb). The face 12 of the silicon substrate 10 may be a face (100).
    [0007] The germination pads 16, also called germination islands, are made of a material that promotes the growth of the yarns 20. A treatment may be provided to protect the lateral flanks of the seedlings and the surface of the parts of the substrate not covered by the bumps. germination to prevent the growth of yarns on the lateral flanks of the seedlings and on the surface of the parts of the substrate not covered by the seedlings. The treatment may include forming a dielectric region on the lateral flanks of the seed pads and extending on and / or in the substrate between the pads, the wires not growing on the dielectric region. Alternatively, the seed pads 16 may be replaced by a seed layer overlying the face 12 of the substrate 10. A dielectric region may then be formed above the seed layer to prevent growth of wires in the seed layers. unwanted areas. By way of example, the material constituting the seed pads 16 may be a nitride, a carbide or a boride of a transition metal of column IV, V or VI of the periodic table of the elements or a combination of these compounds. . By way of example, the seed pads 16 may be made of aluminum nitride (AlN), boron (B), boron nitride (BN), titanium (Ti), titanium nitride (TiN), tantalum (Ta), tantalum nitride (TaN), hafnium (Hf), hafnium nitride (HfN), niobium (Nb), niobium nitride (NbN), zirconium (Zr), of zirconium borate (ZrB2), zirconium nitride (ZrN), silicon carbide (SiC), nitride and tantalum carbide (TaCN), magnesium nitride in the form MgxNy, where x is about 3 and y is about 2, eg magnesium nitride in the form of Mg3N2 or gallium magnesium nitride (MgGaN), tungsten (W), tungsten nitride (WN) or a combination of those -this. The seed pads 16 may be doped with the same type of conductivity as the substrate 10. The insulating layer 26 may be of a dielectric material, for example silicon oxide (SiO2), silicon nitride (SixNy, where x is about 3 and y is about 4, for example Si 3 N 4), silicon oxynitride (in particular of general formula SiO x N y, for example Si 2 O 2), aluminum oxide (Al 2 O 3), hafnium oxide (Hf02) B12791 - DD14773JBD or diamond. For example, the thickness of the insulating layer 26 is between 5 nm and 500 nm, for example equal to about 30 nm. The wires 20 are at least partly formed from at least one semiconductor material. The wires 20 may be at least partially formed from semiconductor materials predominantly comprising a III-V compound, for example a III-N compound. Examples of group III elements include gallium (Ga), indium (In) or aluminum (Al). Examples of III-N compounds are GaN, AlN, InN, InGaN, AlGaN or AlInGaN. Other group V elements may also be used, for example, phosphorus or arsenic. In general, the elements in compound III-V can be combined with different mole fractions. The wires 20 may comprise a dopant. By way of example, for compounds III-V, the dopant may be chosen from the group comprising a group II P dopant, for example magnesium (Mg), zinc (Zn), cadmium (Cd ) or mercury (Hg), a Group IV P-type dopant, for example carbon (C) or a group IV N-dopant, for example silicon (Si), germanium (Ge), selenium (Se), sulfur (S), terbium (Tb) or tin (Sn). The cross-section of the yarns 20 may have different shapes, such as, for example, an oval, circular or polygonal shape, in particular triangular, rectangular, square or hexagonal. Thus, it is understood that when the "diameter" in a cross-section of a wire or a layer deposited on this wire is mentioned here, it is a quantity associated with the surface of the structure referred to in this section. cross section, corresponding, for example, to the diameter of the disc having the same area as the cross section of the wire. The height H1 of each wire 20 can be between 250 nm and 50 pin. Each wire 20 may have an elongate semiconductor structure along an axis substantially perpendicular to the face 12. Each wire 20 may have a generally cylindrical shape. The adjacent two-wire axes can be from 0.5 fun to 10 fun and preferably from 1.5 fun to 6 gm. For example, the son 20 may be regularly distributed, in particular according to a hexagonal network.
    [0008] For example, the lower portion 22 of each wire 20 is mainly composed of compound III-N, for example doped gallium nitride of the same type as the region 14, for example N-type, for example silicon. The height portion H2 which may be less than 22 ranges from 100 nm to 25 gm. By way of example, the upper portion 24 of each wire 20 is at least partially made of a III-N compound, for example GaN. The upper portion 24 may be N-type doped, possibly less heavily doped than the lower portion 22, or not be intentionally doped. The upper portion 24 extends over a height H3 which may be between 100 nm and 25 gm. The shell 28 may comprise a stack of several layers including: - an active layer covering the upper portion 24 of the associated wire 20; an intermediate layer of conductivity type opposite to the lower portion 22 covering the active layer; and a connecting layer covering the intermediate layer and covered by the electrode 30. The active layer is the layer from which the majority of the radiation provided by the LED is emitted. In one example, the active layer may include containment means, such as multiple quantum wells. For example, it consists of alternating layers of GaN and InGaN having thicknesses of 5 to 20 nm (for example 2.5 nm). For example, the N or P type layers (example 8 nm) and from 1 to 10 nm (by GaN may be doped, for example, the active layer B12791 - DD14773JBD 12 may comprise a single layer of InGaN, For example, with a thickness greater than 10 nm, the intermediate layer, for example a P-type doped layer, may correspond to a semiconductor layer or a stack of semiconductor layers and allows the formation of a PN or PIN junction, the active layer. being between the P-type intermediate layer and the N-type upper portion 24 of the PN or PIN junction The bonding layer may correspond to a semiconductor layer or to a stack of semiconductor layers and allows the formation of a contact Ohmic between the intermediate layer and the electrode 30. By way of example, the bonding layer can be very strongly doped of the type opposite to the lower portion 22 of each wire 20, to degenerate the neck or neck. semiconductors, for example doped P-type at a concentration greater than or equal to 1020 atoms / cm3. The semiconductor layer stack may comprise an electron blocking layer formed of a ternary alloy, for example gallium aluminum nitride (AlGaN) or indium aluminum nitride (. AlInN) in contact with the active layer and the intermediate layer, to ensure a good distribution of the electric carriers in the active layer. The electrode 30 is adapted to polarize the active layer of each wire 20 and let the electromagnetic radiation emitted by the LEDs LED. The material forming the electrode 30 may be a transparent and conductive material such as indium tin oxide (ITO), zinc oxide doped with aluminum or graphene. By way of example, the electrode layer 30 has a thickness of between 5 nm and 200 nm, preferably between 20 nm and 50 nm. The mirror conductive layer 32 preferably corresponds to a metal layer, for example aluminum, silver, copper or zinc. By way of example, the conductive mirror layer 32 has a thickness of between 20 nm and 300 nm, preferably between 100 nm and 200 nm. The encapsulation layer 34 is made of at least partially transparent insulating material. The maximum thickness of the encapsulation layer 34 is between 250 nm and 50 μm so that the encapsulation layer 34 completely covers the electrode 30 at the top of the LEDs. The active layer of the shell 28 of each LED 10 emits light in all directions. Figures 2 to 6 illustrate the paths traveled by R light beams for different light emission patterns. In FIGS. 2 to 6, layers 30, 32 and 34 have not been shown. We call e the angle formed by the light ray R with respect to the perpendicular direction D to the side walls of the wire 20 and ec the critical angle of total reflection of the assembly comprising the wire 20 and the active layer of the shell 28 Depending on the emission angle e, the light emitted by the active layer of the shell 28 may either couple to a radiated mode called RL, as illustrated in FIG. 2, or to a guided mode called GL, such as this is illustrated in FIG. 3. The guided modes GL have an emission angle e greater than the critical angle of total reflection ec and propagate by zigzagging along the wire 20. In contrast, the radiated modes RL have an emission angle e smaller than the critical angle of total reflection ec and are fully transmitted in the encapsulation layer 34. The critical angle of total reflection ec is given by Snell's law according to relation (1) next: Oc = asin (nencap / nfil) (1) where nencap is the real part the optical refractive index of the encapsulation layer 34 and nfil is the real part of the optical refractive index of the wire 20 and its shell 28, nfil being strictly greater than nencap- the index Optical refraction is a dimensionless number that characterizes the optical properties of a medium, including absorption and scattering. The refractive index is equal to the real part of the complex optical index. The refractive index can be determined, for example, by ellipsometry. According to the angle of incidence e, the guided modes GL are decomposed into lost modes in the SGL substrate (FIG. 4), in reflected RGL modes (FIG. 5) and transmitted TGL (FIG. 6). The SGL modes are guided toward the foot of the wire 20 and lost in the substrate 10. The TGL modes have an angle of incidence at the upper facet of the wire 20 which is less than the critical angle of total reflection and are thus transmitted. in the encapsulation layer 34. The RGL modes are in total reflection condition at the top facet and are returned to the foot of the wire 20 without being extracted. Of the GL guided modes, only the transmitted TGL modes participate in the light perceived by an observer. The modes guided towards the SGL substrate are directly lost and the RGL reflected modes remain trapped inside the wire 20 until they are absorbed or lost in the substrate 10. FIG. 7 represents the part of modes RL, GL, SGL , RGL and TGL as a function of the nencap refractive index of the encapsulation layer 34. The light portion extracted from the light emitting diode is the sum of the RL and TGL parts. FIG. 8 represents an evolution curve CRGL corresponding to the proportion of RGL guided modes on the total number of guided modes GL as a function of the nencap refractive index of the encapsulation layer 34. The curves of FIGS. 8 were obtained in the case of a hexagonal section GaN wire having an average diameter of 800 nm and a shell 275 nm thick.
    [0009] The proportion of radiated modes, RL, increases while the proportion of guided modes, GL, decreases as the refractive index of the encapsulation layer 34 increases. In addition, the proportion of entrapped guided light RGL decreases to zero for a refractive index of the encapsulation layer 34 equal to about 1.73. By simulation, the inventors have demonstrated that the shape of the evolution curves of the proportions of modes RL, GL, SGL, RGL and TGL is substantially the same regardless of the average diameter of the wire 20, as soon as the average diameter of the wire 20 is greater than 200 nm. In particular, the refractive index at which the RGL propagation mode vanishes is substantially independent of the average diameter of the wire 20, as soon as the average diameter of the wire 20 is greater than 200 nm.
    [0010] To be perceived by an observer looking at the optoelectronic device 5, the light must leave the encapsulation layer by the front face 36. The face 36 may correspond to a free surface, that is to say in contact with the air. The greater the difference between the refractive index of the encapsulation layer 34 and the index of the air, the lower the critical angle of total reflection, measured with respect to a direction perpendicular to the face 36, is low that is, the more the light from the LEDs tends to reflect on the face 36. It is therefore not desirable that the refractive index of the encapsulation layer 34 be too high. When the material constituting the yarns and the active layers is a compound III-V, the inventors have demonstrated by simulation that the best compromise was obtained with a refractive index of the encapsulation layer 34 between 1.7 and 1. , 75, preferably between 1.72 and 1.74, more preferably about 1.73. Preferably, the average diameter of the wire 20 is between 200 nm and 1 pin, preferably between 300 nm and 800 nm.
    [0011] The encapsulation layer 34 may comprise a matrix of at least partially transparent inorganic material in which particles of a dielectric material are optionally distributed. B12791 - DD14773JBD The refractive index of the dielectric material composing the particles is strictly greater than the refractive index of the material composing the matrix. In one example, the encapsulation layer 34 comprises a silicone matrix, also called polysiloxane, and further comprises particles of a dielectric material distributed in the matrix. The particles are in any type of material that makes it possible to obtain particles of relatively spherical nanoscale dimensions and having a suitable refractive index. By way of example, the particles may be made of titanium oxide (TiO 2), zirconium oxide (ZrO 2), zinc sulphide (ZnS), lead sulphide (PbS) or amorphous silicon (Si). The average diameter of a particle is the diameter of the sphere of the same volume. The average particle diameter of the dielectric material is between 2 nm and 250 nm. The volume concentration of the particles relative to the total weight of the encapsulation layer 34 is between 1% and 50%. According to another example, the inorganic material is chosen from the group comprising silicon oxides of the SiOx type where x is a real number strictly greater than 0 and less than or equal to 2, silicon oxides of the SiOyNz type where y is a number real strictly greater than 0 and less than or equal to 2 0.57, and and z is strictly greater than 0 and less than or equal to aluminum oxide (A1203). material example, the encapsulation layer 34 may be made of an at least partially transparent organic. According to one the encapsulation layer 34 is made of polyimide. In another example, the encapsulation layer 34 is an epoxy polymer which further comprises particles of a dielectric material distributed in the matrix. The particles may be titanium oxide (TiO2), zirconium oxide (ZrO2), zinc sulphide (ZnS), lead sulphide (PbS) or amorphous silicon (Si). To improve the extraction efficiency of the optoelectronic device 5, a surface treatment, called texturing, can be applied to the face 36 of the encapsulation layer 34 so as to form reliefs on the face 36. For a layer encapsulation process 34 consisting of an inorganic material, the texturing process of the face 36 may comprise a chemical etching step or a mechanical abrasion step, possibly in the presence of a mask protecting treated portions of the face 36 to promote the formation of patterns on the surface. For a layer 34 made of an organic material, the texturing process of the face 36 may comprise a step of stamping, molding, etc. In order to improve the extraction efficiency of the optoelectronic device 5, the encapsulation layer 34 may be covered with a further at least partially transparent layer. The refractive index of the additional layer is then between the refractive index of the encapsulation layer 34 and the refractive index of the air. Alternatively, a stack of at least two layers may cover the encapsulation layer 34. The refractive indices of the layers of the stack are decreasing from the first layer of the stack in contact with the layer 25. encapsulation 34 to the last layer of the stack in contact with the air, the refractive index of the first layer being strictly less than the refractive index of the encapsulation layer 34 and the refractive index of the last layer being strictly greater than the index of refraction of the air. The optoelectronic device according to the embodiment described above advantageously makes it possible to increase the overall extraction efficiency of the optoelectronic device, that is to say measured over the entire face 36.
    [0012] The extraction efficiency can be measured locally, that is to say for a portion of the face 36. It then corresponds to the ratio between the quantity of light that escapes from the optoelectronic device by the portion 5 and the amount of light provided by the light emitting diodes of this portion. It is desirable that variations in the local extraction efficiency over the entire face 36 be as small as possible to prevent an observer from perceiving luminance differences by looking at the optoelectronic device 5. FIG. 9 is a top view of an example of an optoelectronic device 50, comprising all the elements of the optoelectronic device 5 shown in FIG. 1 and in which the LEDs are regularly distributed, for example in rows and columns, on an active area 51 square. The side edges of the active area 51 are designated 52 and the corners of the active area 51 are designated 54. Each light emitting diode is schematically represented by a dot. By way of example, with the exception of the diodes located along the edges 52, each LED is located in the center of a square comprising a light emitting diode at each vertex and a light emitting diode in the middle of each edge. In the example shown in FIG. 9, the density of light-emitting diodes per unit area is substantially constant over the entire active area 51. By way of example, the surface density of light-emitting diodes is substantially constant and between 4 × 10 6 / cm 2 and 3 * 107 / cm 2. FIG. 10 represents the evolution of the local extraction efficiency of the optoelectronic device 50 of FIG. 9 over a quarter of the active zone 51. The curve of FIG. 10 was obtained in the case of a matrix of nanowires. 35 GaN hexagonal section, the distance between the axes of two nanowires being 3 times the average radius of the shell 28 and the refractive index of the material of the encapsulant 34 being equal to 1.75. The local extraction efficiency is greater along the edges 52 relative to the center of the active zone 51. In addition, the local extraction efficiency is greater than the vertices 54 with respect to the edges 52 of the active zone 51. The explanation of this phenomenon is that the greater the number of neighbors close to a light emitting diode, the higher the probability that the light rays emitted by this light-emitting diode will encounter one of the neighboring light-emitting diodes and be absorbed. or trapped by them. By simulation, the inventors have demonstrated a decrease in the extraction efficiency as soon as the distance between the axes of two adjacent LEDs is less than 15 times the mean radius of the shell 28. , it extraction from the center of the diode axis 15 times the radius has been observed that the active zone efficiency reaches a minimum for distances between adjacent electroluminescent lower than the value of which is independent of the number of rows and columns when the number of rows and columns is greater than about 50. FIG. 11 is a view similar to FIG. 9 of an embodiment of an optoelectronic device 60. The optoelectronic device 60 comprises all the elements of the optoelectronic device 50 to the difference that the density of light-emitting diodes per unit area increases gradually from the center of the device to the edges 52. More prec Specifically, the surface density of light-emitting diodes in the center of the active area 51 is strictly less than the surface density of light-emitting diodes along the edges 52. In addition, the surface density of light-emitting diodes along the edges 52 is B12791 - DD14773JBD It is strictly less than the surface density of light-emitting diodes at the vertices 54 of the active zone 51. By way of example, the evolution of the surface density of light-emitting diodes may correspond to the inverse of the evolution of the effectiveness of the electroluminescent diodes. As an example, the surface density of light-emitting diodes in the center of the active zone of the optoelectronic device may be between 2 * 10 6 / cm 2 and 6 * 10 6 / cm 2 while the density 10 light emitting diodes along an edge of the active area of the optoelectronic device may be between 7 * 106 / cm 2 and 2 * 107 / cm2. According to another embodiment, the inventors have demonstrated that the uniformity of the extraction efficiency can be improved by increasing the ratio between the perimeter of the active zone and the surface of the active zone. Preferably, the P / A ratio between the perimeter and the surface of the active zone is greater than 4 for a unit active area surface, preferably greater than or equal to 4.5, more preferably greater than or equal to 5, in particular greater than or equal to 6. Figs. 12 to 20 show schematic top views of optoelectronic device embodiments for each of which only the contour of the active area has been shown. For each of these examples, the ratio between the perimeter of the active zone and the surface of the active zone is strictly greater than that obtained for a square of the same surface. In FIG. 12, the active zone 70 has an annular shape 30 comprising a square outer edge 72 and a square inner edge 74. In FIG. 13, the active zone 76 comprises one or more rectangular zones 78, two rectangular zones being represented. . In Fig. 14, the active area 80 comprises one or more of a strip 82 with wavy edges, two strips 82 being shown. In FIG. 15, the active zone 84 has a triangular shape. In Figure 16, the active area 86 has a star shape. In FIG. 17, the active zone 88 comprises an outer edge 90 in the shape of a star and an inner edge 91 in the shape of a star. Advantageously, the outer perimeter, and possibly the inside, of the active zone follows a curve that is close to a fractal curve. In FIGS. 18, 19 and 20, the active zones 94, 96 and 98 are respectively in the form of a Koch flake after two, three and four iterations. The P / A ratio for a unit active area area is 6.4, 8.5 and 11.4 respectively for the active areas 94, 96 and 98. FIGS. 12 and 17 show examples of active areas corresponding to perforated surfaces. One embodiment of a manufacturing method for obtaining the optoelectronic device 5 comprises the following steps: (1) Formation on the face 12 of the substrate 10 of the seed pads 16. The seed pads 16 can be obtained by depositing a seed layer on the face 12 and etching portions of the seed layer to the face 12 of the substrate 10 to define the seed pads. The seed layer may be deposited by a chemical vapor deposition (CVD) method or an organometallic chemical vapor deposition (MOCVD), also known as a chemical vapor deposition method. known as organometallic vapor phase epitaxy (or MOVPE), which stands for Metal-Organic Vapor Phase Epitaxy. However, methods such as molecular beam epitaxy (MBE), gas-source MBE (MBBE), organometallic MBE (MOMBE), plasma-assisted MBE (PAMBE) Atomic Layer Epitaxy (ALE), Hydride Vapor Phase Epitaxy (HVPE) may be used, or a B12791 - DD14773JBD deposition method may be used. Atomic Layer Deposition (ALD). In addition, methods such as evaporation or reactive sputtering may be used. When the seed pads 16 are made of aluminum nitride, they can be substantially textured and have a preferred polarity. The texturing of the pads 16 can be obtained by an additional treatment carried out after the deposition of the seed layer. This is, for example, annealing under an ammonia (NH 3) stream. (2) Protection of the portions of the face 12 of the substrate 10 not covered with the seed pads 16 to prevent the subsequent growth of son on these portions. This can be obtained by a nitriding step which causes the formation, on the surface of the substrate 10, between the seed pads 16 of silicon nitride regions (for example SiN or Si3N4). This can also be obtained by a step of masking the substrate 10 between the seed pads 16, including the deposition of a layer of, for example, an SiO2 or SiN or Si3N4 dielectric and then etching this layer out of the seed pads. after a photolithography step. In this case, the masking layer can overflow over the seed pads 16. When the protection step (2) is performed by a step of masking the substrate 10, the step of etching the seed layer can to be avoided. The seed pads 16 then consist of a uniform continuous layer and whose surface is left free at the level where the son grow. (3) Growth of the lower portion 22 of each wire 20 on the height H2. Each wire 20 grows from the top 30 of the underlying seed pad 16. The yarn growth process may be a CVD, MOCVD, MBE, GSMBE, PAMBE, ALE, HVPE, ALD method. In addition, electrochemical processes may be used, for example, chemical bath deposition (CBD), hydrothermal processes, liquid aerosol pyrolysis or electrodeposition. By way of example, the yarn growth process may comprise the injection into a reactor of a precursor of a group III element and a precursor of a group V element. Examples of precursors of Group III elements are trimethylgallium (TMGa), triethylgallium (TEGa), trimethylindium (TMIn) or trimethylaluminum (TMA1). Examples of group V precursors are ammonia (NH3), tertiarybutylphosphine (TBP), arsine (AsH3), or asymmetric dimethylhydrazine (UDMH). According to one embodiment of the invention, in a first phase of growth of the son of compound III-V, a precursor of a further element is added in excess in addition to the precursors of III-V compound. The additional element may be silicon (Si). An example of a precursor of silicon is silane (SiH4). The presence of silane among the precursor gases results in the incorporation of silicon into the GaN compound. Thus, an N-type doped lower portion 22 is obtained. In addition, this results in the formation of a layer of silicon nitride, not shown, which covers the periphery of the portion 22 of height H2, with the exception of at the top of the growth of the portion 22. (4) Growth of the upper portion 24 of height H3 of each wire 20 on the top of the lower portion 22. For the growth of the upper portion 24, the conditions The operation of the MOCVD reactor described above is, by way of example, maintained with the exception that the stream of silane in the reactor is reduced, for example by a factor greater than or equal to 10, or stopped. Even when the silane stream is stopped, the upper portion 24 may be N-type doped due to the diffusion in this active portion of dopants from the adjacent passivated portions or due to the residual doping of GaN.
    [0013] B12791 - DD14773JBD 24 (5) Formation of the insulating layer 26, for example by conformal deposition of an insulating layer on the entire structure obtained in step (4) and etching of this layer to expose the upper portion 24 of each wire 20. (6) Epitaxial formation, for each wire 20, of the layers making up the shell 28. Considering the presence of the insulating layer 26 covering the periphery of the lower portion 22, the deposition of the layers composing the shell 28 occurs only on the upper portion 24 of the wire 20 not covered by the insulating layer 26; (7) Formation of the electrode 30, for example by conformal deposition; (8) Formation of the mirror conductive layer 32, for example by physical vapor deposition (PVD) over the entire structure obtained in step (7) or for example by evaporation or by sputtering and etching of this layer to expose each wire 20; (9) Formation of the encapsulation layer 34.
    [0014] When the encapsulation layer 34 is made of silicone, the encapsulation layer 34 may be deposited by a spin coating method, a jet printing method or a screen printing method. When the encapsulation layer 34 is an oxide, it can be deposited by CVD; and (10) cutting the substrate 10 to separate the optoelectronic devices. In the embodiment described above, the insulating layer 26 covers the entire periphery of the lower portion 22 of each wire 20. Alternatively, a portion of the lower portion 22 may not be covered by the insulating layer 26. In this case, the insulating layer 26 covers the wire 20 to a height less than H2 and the shell 28 covers the wire 20 to a height greater than H3. The layer 26 may not cover the lower portion 22 of each wire 20. In this case, the shell 28 may cover each wire 20 on the height H1. In the embodiment described above, the insulating layer 26 does not cover the periphery of the upper portion 24 of each wire 20. Alternatively, the insulating layer 26 may cover a portion of the upper portion 24 of each wire 20. In this case, the insulating layer 26 covers the wire 20 to a height greater than H2 and the shell 28 covers the wire 20 to a height less than H3.
    [0015] According to another variant, the insulating layer 26 may, for each wire 20, partially cover the lower portion of the shell 30. According to a variant of the manufacturing method described above, the layers making up the shell 28 may be formed before the insulating layer 26 on the whole of each wire 20 or only on a portion of the wire 20, for example the upper portion 24. Particular embodiments of the present invention have been described. Various variations and modifications will be apparent to those skilled in the art. In addition, although in the embodiments described above, each wire 20 comprises a passivated portion 22, at the base of the wire in contact with one of the seed pads 16, this passivated portion 22 may not be present.
    [0016] In addition, although embodiments have been described for an optoelectronic device for which the shell 28 covers the top of the associated wire 20 and a portion of the lateral flanks of the wire 20, the shell may be provided only at the top of the wire 20.
    [0017] Various embodiments with various variants have been described above. It is noted that one skilled in the art can combine various elements of these various embodiments and variants without being creative. In particular, the optoelectronic device comprising an encapsulation layer having a refractive index of between 1.7 and 1.75 may also comprise a surface density of the light-emitting diodes which is variable, for example as follows. FIG. 11 furthermore shows that the optoelectronic device comprising an encapsulation layer having a refractive index of between 1.7 and 1.75 may additionally have a ratio between the perimeter and the surface of the active zone which is strictly greater than the ratio obtained for a square active zone, for example as described above in relation with FIGS. 12 to 20. In addition, the optoelectronic device having a ratio between the perimeter and the surface of the zone which is strictly greater than the ratio obtained for a square active area, may further comprise a surface density of the light-emitting diodes which is ariable.
    权利要求:
    Claims (12)
    [0001]
    REVENDICATIONS1. An optoelectronic device (5) comprising: a semiconductor substrate (10) comprising a face (12); light-emitting diodes (LEDs) resting on the face and comprising wired, conical or frustoconical semiconductor elements (20); and an at least partially transparent dielectric layer (34) covering the light-emitting diodes, the dielectric layer having a refractive index of between 1.6 and 1.8.
    [0002]
    2. Optoelectronic device 1, wherein the refractive index of (34) is between 1.7 and 1.75.
    [0003]
    Optoelectronic device according to claim 1, wherein the dielectric layer according to claim 1 or 2, wherein each semiconductor element (20) is predominantly of a III-V compound.
    [0004]
    Optoelectronic device according to claim 3, wherein each semiconductor element (20) mainly comprises gallium nitride. 20
    [0005]
    Optoelectronic device according to any one of claims 1 to 4, wherein the average diameter of each semiconductor element (20) is between 200 nm and 1 pin.
    [0006]
    An optoelectronic device according to any one of claims 1 to 5, wherein the encapsulation layer (34) comprises a matrix of at least partly transparent first material in which particles of a second material are distributed, refractive index of the second material being strictly greater than the index of refraction of the first material.
    [0007]
    Optoelectronic device according to claim 6, wherein the first material is a polysiloxane.
    [0008]
    Optoelectronic device according to claim 6 or 7, wherein the second material is a dielectric material selected from titanium oxide (TiO2), zirconium oxide (ZrO2) and zinc sulfide (ZrO2). ZnS).
    [0009]
    An optoelectronic device according to any one of claims 1 to 5, wherein the encapsulation layer (34) is of a material selected from the group consisting of epoxy polymers, silicon oxides of the SiOx type where x is a real number strictly greater than 0 and less than or equal to 2, silicon oxides of the SiOyNz type, where y is a real number comprised strictly greater than 0 and less than or equal to 2 and z is strictly greater than 0 and less than or equal to 0.57, and aluminum oxide (Al 2 O 3).
    [0010]
    An optoelectronic device according to any one of claims 1 to 9, wherein the light-emitting diodes (LEDs) are distributed over a portion (51) of the face (12) and the surface density of light-emitting diodes (LEDs) on the portion decreases away from the edges (52) of said portion.
    [0011]
    Optoelectronic device according to any of claims 1 to 10, wherein the light emitting diodes (LEDs) are distributed over a portion (70; 76; 80; 84; 86; 88; 94; 96; 98) of the electroluminescent diode (LED). face (12) and wherein the ratio of the perimeter of said portion to the area of said portion is greater than or equal to 4 for a unit area. 25
    [0012]
    Optoelectronic device according to claim 11, wherein the portion (70; 90) corresponds to a perforated surface.
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    公开号 | 公开日
    JP2017501573A|2017-01-12|
    KR102279462B1|2021-07-19|
    TW201535801A|2015-09-16|
    FR3015772B1|2017-10-13|
    CN106415858B|2019-04-23|
    JP2019195077A|2019-11-07|
    TW201921736A|2019-06-01|
    EP3084846A1|2016-10-26|
    KR20160100983A|2016-08-24|
    TWI692886B|2020-05-01|
    US10062818B2|2018-08-28|
    JP6893954B2|2021-06-23|
    JP2019169735A|2019-10-03|
    US9601543B2|2017-03-21|
    US20180219143A1|2018-08-02|
    EP3373344B1|2021-03-17|
    CN106415858A|2017-02-15|
    US20170148960A1|2017-05-25|
    TWI656666B|2019-04-11|
    US20160307960A1|2016-10-20|
    EP3373345B1|2021-09-15|
    EP3084846B1|2018-07-11|
    TW202005123A|2020-01-16|
    EP3373345A1|2018-09-12|
    EP3373344A1|2018-09-12|
    US10177288B2|2019-01-08|
    WO2015091212A1|2015-06-25|
    JP6605472B2|2019-11-13|
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    法律状态:
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